Batch-type Mono-crystalline Texturing Equipment

        PRODUCTS AND SERVICES > Wet Chemical Equipment Series > Batch-type Mono-crystalline Texturing Equipment

        Batch-type Mono-crystalline Texturing Equipment

        Used for texturing& cleaning of mono crystalline wafers.

        Equipment Name:

        Batch-type Mono-crystalline Texturing Equipment

        Equipment Model:

        SC-CSZ12000F-16G

        Equipment Application:

        Used for texturing& cleaning of mono crystalline wafers.

        Process Flow:

        Saw damage removal→Pre-cleaning→Mono-texturing→Post-cleaning/O3 cleaning→Acid cleaning→Hot water drying→Drying (for reference only)

        Features:

        1、Throughput:600pcs/batch,12000pcs/h——210 wafer(100pcs cassette),720pcs/batch,15000pcs/h——182 wafer(120pcs cassette).

        2、Process bath circulation volume adjustable.

        3、Uniform pyramids texture, etch depth adjustable.

        4、Wafer thickness handling capability up to 120μm.

        5、With clean dry area and self-clean dry system.

        6、Low H2O2 consumption.

        7、Quick inline bath change.

        8、Available with MES, RFID system, inline weight testing optional.


        Parameters:


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