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Horizontal Low Pressure Oxidation/Annealing Equipment
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Horizontal Low Pressure Oxidation/Annealing Equipment
Low Pressure oxidation, annealing.
Equipment name:
Horizontal Low Pressure Oxidation/Annealing Equipment
Equipment Model:
DOA-420/DOA-420L/DOA-420MAX
Equipment Application:
Low Pressure oxidation, annealing.
Features:
1、High throughput.
2、Patented technology, compatible or upgradeable with boron diffusion process.
3、Unique double-layer-nested furnace door structure.
4、High-speed and stable integral module boat pushing mechanism.
Parameters:
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